Iranian Society of Acoustics and Vibration and Avecina Journal of Theoretical and Applied Vibration and Acoustics 2423-4761 8 1 2022 07 11 Vibration analysis of two-layered microplate based on the modified couple stress theory using penalty approach 1 12 707282 10.22064/tava.2023.555742.1207 EN Behzad Heidarpour ,Ph.D. Candidate, Faculty of Mechanical and Energy Engineering, Shahid Beheshti University, Tehran, Iran. Mohammadreza Davoodi M.Sc. Student, Faculty of Mechanical and Energy Engineering, Shahid Beheshti University, Tehran, Iran. Abbas Rahi Assistant Professor, Faculty of Mechanical and Energy Engineering, Shahid Beheshti University, Tehran, Iran. Journal Article 2022 02 14 Predicting the vibration behavior of microsystems is of great importance. In this study, the vibration behavior of a microsensor modeled as a two-layer microplate is investigated. The effect of size has been investigated through the modified couple stress theory. The first natural frequency is extracted using the penalty approach. Boundary conditions are modeled using linear or torsional springs. Finally, changes in the natural frequency of the microsystem are presented according to different values ​​of the microplate parameters such as the thickness of the silicon layer and material of the second layer. The results show that the natural frequency decreases as the thickness of the second layer increases. In addition, despite the different first natural frequencies for different parameters, the natural frequency diagram shows the same behavior in terms of system parameters under various boundary conditions. Finally, the effect of the thicknesses ratio   and material length scale parameters ratio  on the natural frequency is investigated.   Predicting the vibration behavior of microsystems is of great importance. In this study, the vibration behavior of a microsensor modeled as a two-layer microplate is investigated. The effect of size has been investigated through the modified couple stress theory. The first natural frequency is extracted using the penalty approach. Boundary conditions are modeled using linear or torsional springs. Finally, changes in the natural frequency of the microsystem are presented according to different values ​​of the microplate parameters such as the thickness of the silicon layer and material of the second layer. The results show that the natural frequency decreases as the thickness of the second layer increases. In addition, despite the different first natural frequencies for different parameters, the natural frequency diagram shows the same behavior in terms of system parameters under various boundary conditions. Finally, the effect of the thicknesses ratio   and material length scale parameters ratio  on the natural frequency is investigated.    https://tava.isav.ir/article_707282_61cbe72baefc1752dec5bfea29eca5a2.pdf